JJG 28-2000

2 引用文献····················································································⋯⋯(1) 3 概述··························································································⋯⋯(1) 4 计量性能要求·...................................................................................(2) 4.1 平行度····················································································⋯⋯(2) 4.2 工作面平面度································。··········································⋯⋯(3) 4.3 非工作面的平面度····················,················································⋯⋯(4) 4.4 稳定性。···················································································⋯⋯(4) 5 通用技术要求·············。····。···························································⋯⋯(4) 5.1 外观及表面质量·.............................................................................(4) 5.2 外形尺寸·......................................................................................(4) 5.3 长平晶十字刻线位置·.......................................................................(6) 5.4 两端面夹角···································································。··········⋯⋯(6) 5.5 工作面与圆柱母线的垂直度······················,····················。·············⋯⋯(6) 6 计量器具控制。。·。································,·········································⋯⋯(6) 6.1 检定项目及主要检定设备····························································⋯⋯(6) 6.2 检定条件···········································································,·····⋯⋯(6) 6.3 检定方法······················································。···························。一(9) 6.4 定型鉴定或样机试验·········································。··。·····················⋯⋯(12) 7 检定结果处理·................................................................................... (13) 8 检定周期····················································································⋯⋯(13) 附录A 平晶表面疵病的尺寸及数量·········。·········································⋯⋯(14) 附录B 平晶材料的试验方法·................................................................. (16) 附录C 四面法检定长平晶数据处理····························。·······。·····。。·······⋯⋯(20) 附录D 等厚干涉法··········································,·····························⋯⋯(24) 附录E 等倾干涉法·········································································。一(26) 附录F 长平晶自重变形量·······························································⋯⋯(28) JJG 28- 2000 平晶检定规程范围本规程适用于平面平晶、平行平晶和长平晶(以下统称平晶)的定型鉴定(或样机试验)、首次检定、后续检定和使用中检验。 引用文献本规程引用下列文献: JB/T 7401-1994平面平晶 JB/T 7402-1994平行平晶 JJF 1001-1998通用计量术语及定义 JJF 1059-1999测量不确定度评定与表示 GB/T 15464-1995仪器仪表包装通用技术条件 GB 903-1987无色光学玻璃使用本规程时,应注意使用上述引用文献的现行有效版本。 概述平晶是以光波干涉法测量平面的平面度、直线度、研合性以及平行度的计量器具。 平面平晶分单、双工作面平晶。按用途又可分为标准平晶和工作平晶两大类。工作平晶分为1, 2级,标准平晶分为1, 2等(其外形见图1)0 tx4夕心20 tx45 双工作面平晶单工作面平晶图 1 平行平晶共分四个系列,每个系列中尺寸相邻的四块可组成一套(其外形见图2)0 长平晶按尺寸分为210 mm和310 mm两种(其外形见图3)0 . TJG 28- 2000 刻商标编号 ( 万下图 2 非工作面图 3 计,性能要求平行度平行平晶两工作面的平行度(见表1的规定)。 表1 系列两工作面的平行度(Ym) I,I 0.6 f u 0.8 N 1.0 JJG 28- 2000 4.2 工作面平面度 4.2.1 平面平晶工作面的平面度 4.2.1.1 工作平晶工作面的平面度在任意两个相互垂直的截面上的要求(见表2)0 两个截面的平面度之差对于1级平晶不大于0.03 tm,对于2级平晶不大于 0.05 tm,在有效直径外只允许塌边,但1级平晶在有效直径外0.5 mm内不得有塌边。 4.2.1.2 只有规格尺寸为150二的1级平晶才可检定为标准平晶。1等标准平晶测量的扩展不确定度U (k二3或p=0.99)不大于0.010 r Lm,有效直径内的平面度不大于 0.03 [m,任意两个截面平面度之差不大于0.015 fcm, (2/3) d内的平面度不大于 0.015 Km; 2等标准平晶测量的扩展不确定度U (k=3或p=0.99)不大于0.020 tim, 有效直径内的平面度不大于0.05 tLm,任意两个截面平面度之差不大于0.03 t im, (2/3) d内的平面度不大于0.03 pmo (2/3) d内的平面度应与总偏差方向一致,两个截面的偏差方向也应一致。 4. 2. 2 平行平晶工作面的平面度不大于0.1 pm(距工作面边缘0.5。范围内只允许塌边),中间三分之二直径范围内的平面度不大于0.05 tmo 4.2.3 长平晶工作面的平面度(见表3的规定)。 UG 28- 2000 表3 规格(mm) 平面度(g ym) 在工作长度内(在无自重变形时) 在横向40 mm内 210 一0.3一0 0.1 310 一0.45一一0.15 0.1 注:“一”表示凹 4.3 非工作面的平面度 4.3.1 平面平晶非工作面的平面度不应超过3 tmo 4.3.2 长平晶非工作面的平面度在任意100 mm内不应超过1.0 prna 4.4 稳定性 1等标准平晶和210 mm长平晶两次周期检定的平面度之差应不大于0. 010 [m, 2 等标准平晶和310 mm长平晶两次周期检定的平面度之差应不大于0.020 pmo 通用技术要求 5.1 外观及表面质量平晶非工作面上应标有制造厂厂名(或厂标)、出厂编号、砸}标志,长平晶非工作面上还应刻有受检点位置的十字刻线。刻字、刻线应清晰。 平晶表面应无破损,玻璃材质应透明,无明显的气泡和条纹,对于新制造的和修理后的平晶表面疵病的尺寸和数量见附录A。使用中的平晶工作面允许有不影响准确度和不损伤被测量具工作面的划痕和破损。 5.2 外形尺寸 5.2.1 平面平晶的外形尺寸(见表4的规定)。修理后的平晶厚度尺寸H允许对基本尺寸减少3 mm, 表4 、 享赢Rf ', P a n1 D H t b 30 30 士0.8 10士1.35 1十8a 6一8 45 45士0.8 15士1.35 1十8a 10 60 60士0.95 20士1.65 1十8a 10 JJG 28- 2000 表4 (续) 、 草赢R } ' -V a m4 D H t b 80 80士0.95 20土1.65 1.5十8a 10 100 100士1.1 25士1.65 1.5'吕a 10 150 150士1.25 30士1.65 2十吕a 10 200 200士1.45 40士1